Journal of Electrochemical Science and Technology

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Methodological Consideration on the Prediction of Electrochemical Mechanical Polishing Process Parameters by Monitoring of Electrochemical Characteristics of Copper Surface: Yong-Jin Seo; J. Electrochem. Sci. Technol. 2020;11(4):346-351. Published online June 5, 2020; DOI: https://doi.org/10.33961/jecst.2019.00640
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